In-process probes are specifically constructed for operation in the reactive molecular beam deposition environment, using low-reactivity construction materials and with extensive surface screening.
Instruments includes the HALO MBE residual gas analyser, the XBS molecular beam deposition rate monitor with ion beam acceptance through a 70o cone angle and a modular SIMS surface analysis tool with integrated fine-focus ion gun for in-process surface layer evaluation.
The AutoSIMS system is offered for measurement of post-process surface layer composition and for depth profile compositional changes through depths typically up to a micron.
The system has an interchangeable cassette-style multi-sample holder with automated X-Y positioning stage enabling fully automated unattended operation. The fine-focus ion gun is both oxygen and argon compatible.
