Brooks Instrument acquires Celerity's instrumentation division

Published: 25-Jun-2009

Brooks Instrument, a US provider of flow measurement and control devices and level gauges, has acquired certain assets of Celerity\'s instrumentation division.


Brooks Instrument, a US provider of flow measurement and control devices and level gauges, has acquired certain assets of Celerity's instrumentation division.

California-based Celerity designs and manufactures precision instruments and advanced gas and liquid delivery solutions, including thermal mass flow devices, for the semiconductor industry.

Brooks says the combined product technology, applications expertise and operating capabilities of the two companies will give customers market-leading products.

"With this acquisition, we strengthen our share in the thermal mass flow instrumentation market and establish an entry point with attractive product technology in vacuum and pressure measurement markets," said Jim Dale, ceo of Brooks Instrument. "Celerity's strong semiconductor market position together with Brooks' strong industrial market position will create the number one thermal mass flow supplier in the world."

The acquisition includes Celerity's GF Series thermal mass flow controller, designed to measure, monitor and control ultra high purity process gas chemistry in semiconductor device and solar cell manufacturing processes; as well as other specialist products for the vacuum and pressure measurement markets.

Brooks has bought Celerity's Allen, TX operations and its Irvine, CA, technology centre together with other sales and service locations worldwide.

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